JPH01115186U - - Google Patents
Info
- Publication number
- JPH01115186U JPH01115186U JP1988010885U JP1088588U JPH01115186U JP H01115186 U JPH01115186 U JP H01115186U JP 1988010885 U JP1988010885 U JP 1988010885U JP 1088588 U JP1088588 U JP 1088588U JP H01115186 U JPH01115186 U JP H01115186U
- Authority
- JP
- Japan
- Prior art keywords
- terminal
- conductive
- electrically connected
- board
- coupling part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002265 prevention Effects 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 240000001973 Ficus microcarpa Species 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Details Of Connecting Devices For Male And Female Coupling (AREA)
- Connecting Device With Holders (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988010885U JPH01115186U (en]) | 1988-01-29 | 1988-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988010885U JPH01115186U (en]) | 1988-01-29 | 1988-01-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01115186U true JPH01115186U (en]) | 1989-08-02 |
Family
ID=31218943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988010885U Pending JPH01115186U (en]) | 1988-01-29 | 1988-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01115186U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019124119A1 (ja) * | 2017-12-21 | 2019-06-27 | 東京エレクトロン株式会社 | 基板支持部材、基板処理装置及び基板搬送装置 |
-
1988
- 1988-01-29 JP JP1988010885U patent/JPH01115186U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019124119A1 (ja) * | 2017-12-21 | 2019-06-27 | 東京エレクトロン株式会社 | 基板支持部材、基板処理装置及び基板搬送装置 |
| KR20200095544A (ko) * | 2017-12-21 | 2020-08-10 | 도쿄엘렉트론가부시키가이샤 | 기판 지지 부재, 기판 처리 장치 및 기판 반송 장치 |
| JPWO2019124119A1 (ja) * | 2017-12-21 | 2020-12-24 | 東京エレクトロン株式会社 | 基板支持部材、基板処理装置及び基板搬送装置 |
| US12321098B2 (en) | 2017-12-21 | 2025-06-03 | Tokyo Electron Limited | Substrate support member, substrate treatment apparatus, and substrate transfer apparatus |